White Light Interferometry

White Light Interferometry (WLI) is one of the most advanced optical measurement techniques for non-contact surface and film thickness analysis. Atometrics provides state-of-the-art interferometry systems that enable nanometer-level vertical resolution, making them ideal for inspecting microstructures, coatings, and precision-engineered components.

Measurement Principle

White light interferometry operates by splitting a broadband light source into two beams—one reflected from the sample surface and the other from a reference mirror. When these beams recombine, interference fringes are formed. By analyzing the interference pattern, the system calculates surface height or film thickness with sub-nanometer precision. This optical method avoids contact damage and provides accurate 3D topographic information.

Key Features

• Nanometer-level accuracy: Achieves ultra-high vertical resolution for precise surface and film characterization.
• Non-contact measurement: Ideal for delicate, soft, or reflective surfaces.
• 3D surface profiling: Captures microtopography over a wide field of view.
• Wide material compatibility: Works with metals, glass, silicon, polymers, and coatings.
• Fast and automated scanning: Suitable for production environments and laboratory research.

Applications

Atometrics white light interferometry systems are used in a broad range of industries:

• Semiconductor wafer surface and film inspection
• Optical component surface form and roughness analysis
• Microelectromechanical systems (MEMS) characterization
• Thin film and coating thickness measurement
• Precision manufacturing quality assurance

Why Choose Atometrics

As a specialist in high-precision measuring instruments, Atometrics integrates optical interferometry with advanced automation and image processing. Our systems deliver stable, repeatable results with high throughput, meeting the demands of both R&D and industrial production. We focus on accuracy, efficiency, and reliability for every measurement challenge.

Conclusion

Atometrics White Light Interferometry solutions provide non-contact, ultra-precise measurement of surface profiles and film thicknesses. Whether in semiconductor manufacturing, optical engineering, or materials science, our instruments deliver the performance and consistency required for next-generation metrology applications.