What Can a Profilometer Measure?
2025-09-09

A profilometer is a professional instrument used for the precise measurement of surface topography, contour dimensions, and micro-roughness. Based on its working principle and application requirements, it can be classified into two main types: contact (stylus type) and non-contact (optical type). The following details its measurement capabilities and main types:

 

 Core Measurement Capabilities of Profilometers

 

1. Geometric Profiles and Dimensions

Basic Parameters: Length, height, angle, radius, groove depth/width, diameter.

Geometric Tolerances: Straightness, roundness, parallelism, profile tolerance, coaxiality.

Complex Curved Surfaces: Convex curves, logarithmic profiles, aspheric optical contours, steep edges (supports angles > 85°).

2. Surface Micro-characteristics

Roughness Parameters: Ra, Rz, Rq, Rsk, etc. (Compliant with ISO/GB standards).

Waviness and Defects: Periodic waviness (Wa, Wt), scratch depth, pitting volume.

Nanometer-level Precision: Resolution down to sub-nanometer level (0.1 nm), capable of measuring ultra-smooth surfaces with Ra as low as 0.01 μm.

3. Special Application Extensions

Industrial Components: Bearing raceway convexity, seal structure angles.

Optical Devices: Lens aspheric curvature, freeform surface deviation.

Material Analysis: Film step height (nanometer to millimeter level), wear volume, 3D topography of microstructures.

 

 Classification and Technical Features of Profilometers

 

1. Contact Profilometers (Stylus Scanning Type)

Principle: A diamond stylus contacts the surface, and the profile is recorded via a displacement sensor.

Applicable Scenarios:

Hard materials (metals, ceramics).

Obstructed areas like deep grooves and inner walls of holes.

High-precision contour dimension measurement (micron level).

Limitations: May damage soft materials; relatively slow scanning speed.

2. Non-contact Profilometers (Optical Type)

Technical Variants:

White Light Interferometers (WLI): Vertical resolution up to 0.1 nm, suitable for transparent films and nano steps.

Laser Scanners: High-speed measurement of large curvature surfaces.

Confocal Microscopes: 3D topography reconstruction, supports highly reflective surfaces.

Advantages:

Non-destructive measurement (soft gels, biological samples).

Sub-micron lateral resolution.

Supports large-area automatic stitching (>200 mm).

Limitations: Transparent or strongly light-absorbing materials may require special treatment.

3. Specialized Type  s

Laser Curtain Profilometers: Online inspection of outer diameter and edge position (e.g., part sorting).

Air-bearing Guideway Profilometers: Straightness/flatness measurement of heavy workpieces (vibration resistant).

 

Key Factors for Selection

 

Parameter

Contact Type

Non-contact Type

Measurement Range

Millimeter level height/length

Millimeter to centimeter level stitching

Resolution

Nanometer vertical resolution

Sub-nanometer vertical resolution

Suitable Materials

Hard, opaque materials

Soft/transparent/highly reflective materials

Typical Scenarios

Bearing raceways, precision mechanical parts

Optical lenses, MEMS chips, thin films

 

 Surface Profiles Suitable for Measurement by White Light Interferometer (WLI)

 

White light interferometers offer sub-nanometer measurement accuracy, with RMS repeatability up to 0.002 nm. They are suitable for measuring microscopic profiles requiring extremely high precision, such as contours of ultra-smooth mirrors orminute structures on semiconductor chips.

2. Acquires surface 3D topography in the form of an "area," enabling comprehensive measurement and analysis of complex three-dimensional contours, such as microlens curved surfaces or 3D structures on etched wafers.

3. Utilizes non-contact surface measurement, avoiding potential scratches or damage to samples caused by traditional contact methods. Suitable for measuring easily damaged materials (e.g., photomasks, glass) and contours of soft materials (e.g., polymers, LCD panels).

4. With stitching technology, the maximum field of view can reach 300mm × 300mm, allowing high-precision contour measurement over large areas. Applicable to samples requiring large-area contour inspection, such as large metal sheets or PCB substrates.

5. Features exceptional angle capability beyond traditional limits: up to 53° for smooth surfaces and 90° for local profile inclination. Enables measurement of contours with steep angles, such as the sharp edges of cutting tools or vertical sidewalls of semiconductor etches.

6. Can be combined with various measurement tools (e.g., profile analysis, angle measurement, line roughness calculation) for multi-dimensional contour analysis. Suitable for scenarios requiring comprehensive evaluation of contour parameters, such as parts needing simultaneous inspection of surface roughness and contour shape.

What Can a Profilometer Measure?

 

 Surface Profiles Suitable for Measurement by 3D line laser measuring instrument 

  1. High resolution of 4096 points/profile and Z-axis repeatability up to 0.1 μm (e.g., model AR-9010). Suitable for measuring microscopic contour details on surfaces like semiconductor chips and precision molds, such as the dimensions and shapes of tiny grooves and protrusions.
  2. High scanning frequency up to 40 kHz enables real-time contour capture of moving objects, for example, contour inspection of parts on high-speed production lines, ensuring accuracy during dynamic processes.
  3. Employs advanced reflective filtering algorithms and HDR technology to effectively handle contour measurement of highly reflective surfaces (e.g., polished metal mirrors, coated glass), reducing reflective interference and extracting accurate contour data.
  4. Different models cover a wide measurement range; for instance, the X-axis width can reach 121mm for model AR-9100 and 280mm for AR-8190. Combined with stitching measurement function, enables overall contour inspection of large-sized workpieces (e.g., automotive panels, large mechanical parts).
  5. Good angle capability allows measurement of contours with complex structures like steep sidewalls and deep grooves, such as cutting tool edge contours or gear tooth profiles, accurately acquiring their 3D shape parameters.
  6. High-speed scanning and free ROI (Region of Interest) cropping function enable significantly improve inspection efficiency. Suitable for contour screening in mass production, such as online full inspection of 3C product components, quickly identifying contour defects (e.g., burrs, deformation, dimensional out-of-tolerance).
  7. Through optimized optical design and algorithms, which can measure contours of transparent materials (e.g., glass, acrylic) or low-reflectivity materials (e.g., rubber, plastic), for example, inspecting the edge contours of transparent screens or the parting line contours of plastic casings.