The measurement accuracy is less than 1 nanometer, and the performance is in the world's first echelon. The flagship white light interferometer of Atometrics is released

Atometrics's new flagship white light interferometer AM8000 was officially released recently after completing the first internal customer experience meeting at the 2025 Shanghai Munich International Photonics Fair. This white light interferometer can perform sub-nanometer level measurements on the surfaces of various precision parts and materials, obtain surface 3D topography, and the measurement accuracy is less than 1nm.

In terms of application scenarios, intelligent operation, and measurement stability, AM8000 can fully match the flagship products of the world's top brands. This means that Chinese brands have achieved core technological breakthroughs in the field of high-precision white light interferometry.

• Adapt to more lenses and measurement samples

Meeting the needs of semiconductor, precision optics and other industries

The domestic white light interferometers currently on the market are mainly matched with lenses with short focal length and small field of view. The Atometrics white light interferometer AM8000 supports lenses with more magnifications, such as 1X long focal length and large field of view lens, with a single field of view of 18×11mm, which can well meet the needs of large-scale measurement; such as long focal length 5X and 10X lenses, with focal lengths of 40mm and 22mm respectively, which can achieve the measurement of large-hole samples such as injectors; the expansion of the adapted lenses allows AM8000 to meet the measurement needs of more special parts. In addition, AM8000 also supports lens travel adaptation to ensure that after assembling different lenses, it will not hit the measured object due to misoperation.

AM8000搭载了4自由度直驱电控平台，平台的XY行程最大可达300mm，负载能力提升2.5倍，移动拼接速度提升30%，定位精度提升3倍。对白光干涉仪而言，要满足更多规格样品，就需要提升其平台行程，但行程提升会带来不确定性，从而影响精度。AM8000的电控平台在实现大行程同时，其运动直线度仍可达到±1um，角摆≤5角秒。此外，AM8000还可加装旋转平台，满足晶圆的Mapping测量需求。

此外，AM8000还增加了循环测量、批量导出测量报告、对焦曲线、提取评比ROI等功能，并拥有超过300+的测量工具，如面粗糙度、轮廓分析、纹理方向、粒子分析、纹理均质性等，更好地满足各行业的应用需求。

AM8000 is equipped with a 4-DOF direct-drive electric control platform. The platform's XY travel can reach up to 300mm, the load capacity is increased by 2.5 times, the mobile splicing speed is increased by 30%, and the positioning accuracy is increased by 3 times. For white light interferometers, to meet more specifications of samples, it is necessary to increase its platform travel, but the increase in travel will bring uncertainty, thus affecting the accuracy. While achieving a large travel, the electric control platform of AM8000 can still achieve a linear motion of ±1um, and the angular swing is ≤5 arc seconds. In addition, AM8000 can also be equipped with a rotating platform to meet the mapping measurement needs of wafers.

In addition, AM8000 has added functions such as cyclic measurement, batch export of measurement reports, focus curves, extraction and evaluation ROI, and has more than 300+ measurement tools, such as surface roughness, contour analysis, texture direction, particle analysis, texture homogeneity, etc., to better meet the application needs of various industries.

• One-click automatically focus + leveling

Improve operating efficiency by 7 times

In the operation of white light interferometer, the most tedious and time-consuming part is manual focusing and leveling. This often depends on the experience of engineers, which also raises the operating threshold of white light interferometer. AM8000 has launched the "PreciTrack Fringe Autofocus" function. Engineers only need to place the object and click one-button focus to complete the focus + find interference fringes within 5 seconds, which is 7 times more efficient than manual focus operation. In terms of leveling, AM8000 has also launched the industry's first "EquiDrive automatic leveling" function, which can complete leveling within 5 seconds and reduce the number of interference fringes within the measurement range to 1 or 0, which is 8 times more efficient than manual leveling operation.

In the measurement of large-size parts, AM8000 has a variety of splicing methods, such as square rings, circles, and donuts. Engineers can directly input values ​​to automatically generate the required splicing area. When measuring samples in batches, AM8000 supports multi-point programming measurement, based on the sample position, automatic positioning for measurement, without the need to manually place the sample each time.

AM8000 also adds a controller module, which integrates platform movement, light source adjustment, focusing and other functions into the controller. Engineers can complete routine operations with one click, which can improve work efficiency by 50%.

• Built-in air flotation + low center of gravity mechanism

Vibration isolation stability increased by 2.7 times

White light interferometer is a precision measuring instrument. External vibration or accidental touching of the equipment by personnel can easily affect the measurement results. Therefore, many units will configure a stable environment for white light interferometer. This greatly increases the application threshold of the equipment. How to reduce environmental impact has become an important direction for global leading brands to improve equipment performance.

In order to solve this problem, AM8000 uses a built-in air-floating buffer mechanism to wrap the entire vibration isolation mechanism and workbench. At the same time, through the original low center of gravity design, the impact of environmental vibration on the equipment is greatly reduced. After testing, the vibration isolation stability of AM8000 is increased by 2.7 times, and the RMS repeatability can reach 0.0041nm.

In addition, the AM8000 is equipped with a 5000um wide-range piezoelectric ceramic, a 5-megapixel high-speed camera, and the industry's first SST + GAT algorithm. It supports PSI (phase shift scanning) + VSI (vertical scanning), and can complete sub-nanometer data acquisition instantly.

At present, AM8000 can be applied to new energy, automobile, 3C electronics, semiconductor, precision optics, micro-nano processing, medical equipment, friction and wear and other fields, such as copper foil/aluminum foil roughness measurement, perovskite coating thickness measurement, photovoltaic grid line height measurement, gear surface roughness measurement, plow groove cross-sectional area measurement, precision polishing surface roughness measurement, advanced packaging morphology analysis, ceramic substrate step height/flatness measurement, ultra-smooth roughness measurement, microfluidic chip morphology, implant morphology/roughness, artificial lens morphology/roughness, etc.

After achieving significant improvements in application scenarios, intelligent operation, and measurement stability, AM8000 can now fully compete with the flagship products of the world's top brands. This also means that Chinese brands have achieved core technological breakthroughs in the field of high-precision white light interferometry, helping China's intelligent manufacturing industry break the bottleneck of foreign technology, enhance high-end supply, and support the construction of a strong manufacturing country and a strong quality country.